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Enhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowth

Lookup NU author(s): Professor Nick Cowern

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Author(s): Pawlak BJ, Vandervorst W, Smith AJ, Cowern NEB, Colombeau B, Pages X

Publication type: Article

Publication status: Published

Journal: Applied Physics Letters

Year: 2005

Volume: 86

Issue: 10

ISSN (print): 0003-6951

ISSN (electronic): 1077-3118

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.1882756

DOI: 10.1063/1.1882756

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