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Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth

Lookup NU author(s): Professor Nick Cowern

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Author(s): Pawlak BJ, Duffy R, Janssens T, Vandervorst W, Maex K, Smith AJ, Cowern NEB, Dao T, Tamminga Y

Publication type: Article

Publication status: Published

Journal: Applied Physics Letters

Year: 2005

Volume: 87

Issue: 3

ISSN (print): 0003-6951

ISSN (electronic): 1077-3118

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.1997276

DOI: 10.1063/1.1997276

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