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Defect evolution and dopant activation anomalies in ion implanted silicon

Lookup NU author(s): Professor Nick Cowern

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Author(s): Cristiano F, Lamrani Y, Severac F, Gavelle M, Boninelli S, Cherkashin N, Marcelet O, Claverie A, Lerch W, Paul S, Cowern NEB, Duffy R

Publication type: Article

Publication status: Published

Journal: Nuclear Instruments and Methods in Physics Research B

Year: 2006

Volume: 253

Issue: 1-2

Pages: 68-79

ISSN (print): 0168-583X

ISSN (electronic): 1872-9584

Publisher: Elsevier BV

URL: http://dx.doi.org/10.1016/j.nimb.2006.10.046

DOI: 10.1016/j.nimb.2006.10.046

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