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On the stability and composition of Ni-silicided Si1-xGex films

Lookup NU author(s): Dr Sanatan Chattopadhyay

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Author(s): Pey KL, Chattopadhyay S, Choi WK, Miron Y, Fitzgerald EA, Antoniadis DA, Ospowicz T

Publication type: Article

Publication status: Published

Journal: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year: 2004

Volume: 22

Issue: 2

Pages: 852-858

ISSN (print): 1071-1023

ISSN (electronic): 1520-8567

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1116/1.1688350

DOI: 10.1116/1.1688350

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