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Effect of residual damage on carrier transport properties in a 4H-SiC double implanted bipolar junction transistor

Lookup NU author(s): Dr Sylvie Ortolland, Professor Nick Wright, Dr Christopher Johnson


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Nitrogen implantation into a boron implanted layer is a potential technology for the fabrication of double-implanted n-p-n bipolar transistor. The effect of various implant and anneal schedules on two key device parameters is studied: 1) residual implant damage close to the emitter-base junction and 2) ohmic contact resistance of the highly doped implanted emitter. The effects of post-implant anneal conditions on the level of residual damage under the nitrogen implant after different anneal processes are investigated using the PAS and RBS techniques. The PAS data show clearly that after implantation there is a substantial defect concentration as far as 400nm - significantly below the range of the nitrogen implant (in this case 150nm). The surface morphology of the nitrogen implanted emitter after a high temperature annealing is investigated by AFM. Surface roughness increases significantly at higher annealing temperatures, taking the form of a periodic undulation at 1700C. Hall effect and contact resistivity measurements show that higher annealing temperatures result in decreased ohmic contact resistivity but poor surface mobility. Finally surface profiles show significant lattice swelling following highly doped nitrogen implant which can only partially be removed after annealing.

Publication metadata

Author(s): Ortolland S, Wright NG, Johnson CM, Knights AP, Coleman PG, Burrows CP, Pidduck AJ

Publication type: Article

Publication status: Published

Journal: Materials Science Forum

Year: 2001

Volume: 353-356

Pages: 567-570

Print publication date: 01/01/2001

ISSN (print): 02555476

ISSN (electronic):

Publisher: Trans Tech Publications Ltd


DOI: 10.4028/

Notes: Originally presented at: the Third European Conference on Silicon Carbide and Related Materials (ECSCRM2000), held September 3-7, 2000 in Kloster Banz, Germany


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