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Ultra shallow boron base profile with carbon implantation

Lookup NU author(s): Professor Nick Cowern


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Publication metadata

Author(s): Cowern NEB; Magnee PHC; Kemmeren ALAM; Slotboom JW; Havens RJ; Huizing HGA

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Proceedings of the 2001 Bipolar/BiCMOS Circuits and Technology Meeting

Year of Conference: 2001

Pages: 64–67

ISSN: 0780370198

Publisher: Institution of Electronic and Electrical Engineers