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Deactivation of ultra shallow B and BF2 profiles after non-melt laser annealing

Lookup NU author(s): Professor Nick Cowern

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Author(s): Sharp JA, Cowern NEB, Webb RP, Giubertoni D, Gennaro S, Bersani M, Foad MA, Kirkby KJ

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Materials Research Society Symposium Proceedings: Doping Engineering for Device Fabrication

Year of Conference: 2006

Pages: 159-163

ISSN: 0272-9172

Publisher: Materials Research Society

Library holdings: Search Newcastle University Library for this item

ISBN: 19464274

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