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Lookup NU author(s): Professor Nick Cowern
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Author(s): Cowern NEB; Colombeau B; Lampin E; Cristiano F; Claverie A; Lamrani Y; Duffy R; Venezia V; Heringa A; Wang CC; Zechner C
Editor(s): King, T.J., Lander, R.J.P., Saito, S., Yu, B.
Publication type: Conference Proceedings (inc. Abstract)
Publication status: Published
Conference Name: Materials Research Society Symposium Proceedings: CMOS Front-End Materials and Process Technology
Year of Conference: 2003
Pages: 199-204
ISSN: 0272-9172
Publisher: Materials Research Society
URL: http://dx.doi.org/10.1557/PROC-765-D6.8
DOI: 10.1557/PROC-765-D6.8
Library holdings: Search Newcastle University Library for this item
ISBN: 9781558997028
