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Physics-based diffusion simulations for preamorphized ultrashallow junctions

Lookup NU author(s): Professor Nick Cowern


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Publication metadata

Author(s): Cowern NEB; Colombeau B; Lampin E; Cristiano F; Claverie A; Lamrani Y; Duffy R; Venezia V; Heringa A; Wang CC; Zechner C

Editor(s): King, T.J., Lander, R.J.P., Saito, S., Yu, B.

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Materials Research Society Symposium Proceedings: CMOS Front-End Materials and Process Technology

Year of Conference: 2003

Pages: 199-204

ISSN: 0272-9172

Publisher: Materials Research Society


DOI: 10.1557/PROC-765-D6.8

Library holdings: Search Newcastle University Library for this item

ISBN: 9781558997028