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Issues on boron electrical activation in silicon: experiments on boron clusters and shallow junctions formation

Lookup NU author(s): Professor Nick Cowern

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Publication metadata

Author(s): Cowern NEB; Mannino G; Privitera V; Salmi SB

Publication type: Article

Publication status: Published

Journal: Nuclear Instruments & Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Year: 2002

Volume: 186

Issue: 1-4

Pages: 246-255

ISSN (print): 0168-583X

ISSN (electronic): 1872-9584

Publisher: Elsevier BV

URL: http://dx.doi.org/10.1016/S0168-583X(01)00903-X

DOI: 10.1016/S0168-583X(01)00903-X

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