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A microfabricated spring-constant calibration device for atomic force microscopy (AFM) potentially traceable to the SI

Lookup NU author(s): Professor Peter Cumpson, Dr John Hedley


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We have developed a compact and easy-to-use MEMS (micro electro-mechanical) calibration device for Atomic Force Microscopy, using a method that allows traceability to the SI system. The new device, which we call an Electrical Nanobalance, is calibrated by a non-contact method, a combination of electrical measurements and Doppler velocimetry. For the AFM user, the device offers a simple, accurate and traceable method for AFM cantilever spring constant calibration, for the first time. © 2004 British Crown Copyright.

Publication metadata

Author(s): Cumpson PJ, Hedley J

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Conference on Precision Electromagnetic Measurements Digest

Year of Conference: 2004

Pages: 269-270

Publisher: IEEE


DOI: 10.1109/CPEM.2004.305567

Library holdings: Search Newcastle University Library for this item

ISBN: 0780384938