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Investigation of a novel rapid thermal processing concept using an electro-optically controlled radiation cavity

Lookup NU author(s): Professor Nick Cowern

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Author(s): Cowern NEB, Roozeboom F, van der Sluis P

Editor(s): Tsoukalas, D; Tsamis, C

Publication type: Book Chapter

Publication status: Published

Book Title: Simulation of Semiconductor Processes and Devices 2001 - Sispad 01

Year: 2001

Pages: 344-347

Publisher: Birkhauser

URL: http://books.google.co.uk/books?id=23iY6eBRRVoC&pg=PA344&lpg=PA344&dq=Investigation+of+a+novel+rapid+thermal+processing+concept+using+an+electro-optically+controlled+radiation+cavity&source=bl&ots=Si0EM-58cK&sig=9h59PNoklaIkY4MxSayfF5DCoNw&hl=en&sa=X&ei=h9S0T-l1x5_yA9Dj_Rg&ved=0CE4Q6AEwAQ#v=onepage&q=Investigation%20of%20a%20novel%20rapid%20thermal%20processing%20concept%20using%20an%20electro-optically%20controlled%20radiation%20cavity&f=false

Library holdings: Search Newcastle University Library for this item

ISBN: 9783211837085

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