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Investigation of a novel rapid thermal processing concept using an electro-optically controlled radiation cavity

Lookup NU author(s): Professor Nick Cowern


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Publication metadata

Author(s): Cowern NEB, Roozeboom F, van der Sluis P

Editor(s): Tsoukalas, D; Tsamis, C

Publication type: Book Chapter

Publication status: Published

Book Title: Simulation of Semiconductor Processes and Devices 2001 - Sispad 01

Year: 2001

Pages: 344-347

Publisher: Birkhauser


Library holdings: Search Newcastle University Library for this item

ISBN: 9783211837085