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On high dose nitrogen implantation of PVD titanium nitride

Lookup NU author(s): Professor Steve BullORCiD


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A 3 × 3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties-a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3 × 1017 ions cm- 2 is optimal provided that the dose rate does not exceed the present industrial standard. © 2005 Elsevier B.V. All rights reserved.

Publication metadata

Author(s): Sharkeev YP, Bull SJ, Perry AJ, Klingenberg ML, Fortuna SV, Michler M, Manory RR, Shulepov IA

Publication type: Article

Publication status: Published

Journal: Surface and Coatings Technology

Year: 2006

Volume: 200

Issue: 20-21

Pages: 5915-5920

ISSN (print): 0257-8972

ISSN (electronic):

Publisher: Elsevier SA


DOI: 10.1016/j.surfcoat.2005.09.010


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