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A study of boron implantation into high Ge content SiGe alloys

Lookup NU author(s): Dr Suresh Uppal


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We report an experimental and simulation study for introducing Boron ions into high Ge content relaxed SiGe layers and into Ge wafers. The successful calibration of our Monte Carlo ion implantation simulator for this wide class of materials is demonstrated by comparing the predicted Boron profiles with SIMS data. The larger nuclear and electronic stopping power of the Ge atom is responsible for the trend to shallower profiles with increasing Ge content in SiGe alloys. The generated point defects are estimated by using a modified Kinchin-Pease model. We found that the higher displacement energy in Ge, the stronger backscattering effect, and the smaller energy transfer from the ion to the primary recoil of a collision cascade are mainly responsible for the significantly reduced damage in Ge. Finally the point responses in Si and Ge are presented and the Boron distributions are discussed. copyright The Electrochemical Society.

Publication metadata

Author(s): Wittmann R, Uppal S, Hossinger A, Cervenka J, Selberherr S

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: ECS Transactions: 210th ECS Meeting

Year of Conference: 2006

Pages: 667-676

ISSN: 1938-5862

Publisher: Electrochemical Society, Inc.


DOI: 10.1149/1.2355862

Library holdings: Search Newcastle University Library for this item

ISBN: 19386737