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Boron diffusion in strained and strain-relaxed SiGe

Lookup NU author(s): Professor Nick Cowern


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Publication metadata

Author(s): Wang CC, Huang TY, Sheu YM, Duffy R, Heringa A, Cowern NEB, Griffin PB, Diaz CH

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)

Year of Conference: 2004

Pages: 41-44

Publisher: IEEE