Toggle Main Menu Toggle Search

Open Access padlockePrints

Current understanding and modeling of B diffusion and activation anomalies in preamorphized ultra-shallow junctions

Lookup NU author(s): Professor Nick Cowern


Full text for this publication is not currently held within this repository. Alternative links are provided below where available.

Publication metadata

Author(s): Colombeau B, Smith AJ, Cowern NEB, Pawlak BJ, Cristiano F, Duffy R, Claverie A, Ortiz CJ, Pichler P, Lampin E, Zechner C

Editor(s): Pichler, P., Claverie, A., Lindsay, R., Orlowski, M., Windl, W.

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Silicon Front-End Junction Formation-Physics and Technology

Year of Conference: 2004

Pages: 91-102

ISSN: 0272-9172

Publisher: Materials Research Society

Library holdings: Search Newcastle University Library for this item

Series Title: Materials Research Society Symposium Proceedings

ISBN: 1558997601