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Vacancy engineering for ultra-shallow junction formation

Lookup NU author(s): Professor Nick Cowern

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Publication metadata

Author(s): Gwilliam R, Cowern NEB, Colombeau B, Sealy B, Smith AJ

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 19th International Conference on Application of Accelerators in Research and Industry

Year of Conference: 2006


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