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Browsing publications by
Pedro Ortiz Bahamon.
Newcastle Authors
Title
Year
Full text
Dr Sunilkumar Rana
Ivano Gregoratto
Pedro Ortiz Bahamon
Dr Alun Harris
Emeritus Professor James Burdess
et al.
Accurate Surface-to-Bulk Feature Alignment and Feature Size Preservation During Double-Sided Wafer Processing Using C4F8 Plasma Polymer for the Fabrication of Electrostatically Actuated Cantilever Devices
2010