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Measurement of the nanoscale roughness of advanced MOSFET layer structures

Lookup NU author(s): Dr Sarah Olsen, Professor Anthony O'Neill

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Author(s): Olsen SH; O'Neill AG; Norris DJ; Cullis AG

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Materials Research Society Conference (MRS)

Year of Conference: 2002

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