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Review of Stress Effects on Dopant Solubility in Silicon and Silicon-Germanium Layers

Lookup NU author(s): Dr Nick Bennett, Dr Chihak Ahn, Professor Nick Cowern

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Publication metadata

Author(s): Bennett NS, Ahn C, Cowern NEB, Pichler P

Publication type: Article

Publication status: Published

Journal: Solid State Phenomena

Year: 2010

Volume: 156-158

Pages: 173-180

Print publication date: 01/10/2009

ISSN (print): 1012-0394

Publisher: Scitec Publications Ltd

URL: http://dx.doi.org/10.4028/www.scientific.net/SSP.156-158.173

DOI: 10.4028/www.scientific.net/SSP.156-158.173

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