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Development of a high bandwidth XY stage for vibration-assisted milling

Lookup NU author(s): Dr Dehong Huo, Dr Wanqun Chen, Lu Zheng, Dr Jack Hale


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To realize vibration assisted machining (VAM) in micro milling, a high bandwidth XY vibration stage driven by piezoelectric stack actuators was designed, analysed and tested. Firstly, a novel flexure-joint configuration was proposed by comparing several alternative XY stage configurations. The proposed configuration employs double coupling circle flexure-joint structures which can suppress the coupling displacements of the stage along X and Y directions effectively. Secondly, in order to meet the machining requirements of high spindle speed in micro milling, the structural parameters of the proposed vibration stage are optimized by the finite element method to improve the resonance while reducing the stiffness of the vibration stage. The resonance frequencies of larger than 2, 000 Hz in both directions and low stiffness of 50N/μm were obtained through the parameter optimization. Finally the experiments were performed on the designed stage using two capacitance displacement sensors, and the transient vibration locus of the stage is obtained.

Publication metadata

Author(s): Huo D, Chen W, Lin C, Zheng L, Hale J

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017

Year of Conference: 2017

Pages: 443-444

Acceptance date: 01/01/1900

Publisher: euspen

Library holdings: Search Newcastle University Library for this item

ISBN: 9780995775107