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Aluminium implantation induced linear surface faults in 4H-SiC

Lookup NU author(s): Professor Nick Wright, Dr Konstantin VasilevskiyORCiD, Irina Nikitina, Dr Alton Horsfall, Dr Christopher Johnson, Praneet Bhatnagar, Peter Tappin

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Publication metadata

Author(s): Wright NG, Vassilevski KV, Nikitina I, Horsfall AB, Johnson CM, Bhatnagar P, Tappin P

Publication type: Article

Publication status: Published

Journal: Materials Science Forum

Year: 2005

Volume: 483-485

Pages: 613-616

Print publication date: 01/01/2005

ISSN (print): 0255-5476

ISSN (electronic): 1422-6375

Publisher: Trans Tech Publications Ltd.


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