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Vacancy engineering for highly activated ‘diffusionless’ boron doping in bulk silicon

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern, Shona Paul

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Publication metadata

Author(s): Bennett NS, Cowern NEB, Paul S, Lerch W, Kheyrandish H, Smith AJ, Gwilliam R, Sealy BJ

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 38th European Solid-State Device Research Conference (ESSDERC)

Year of Conference: 2008

Pages: 290

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