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Structural and electrical characterisation of ion-implanted strained silicon

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

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Author(s): Horan K, Lankinen A, O'Reilly L, Bennett NS, McNally PJ, Sealy BJ, Cowern NEB, Tuomi TO

Publication type: Article

Publication status: Published

Journal: Materials Science and Engineering B: Advanced Functional Solid-state Materials

Year: 2008

Volume: 154-155

Issue: 1-3

Pages: 118-121

ISSN (print): 1873-4944

Publisher: Elsevier SA

URL: http://dx.doi.org/10.1016/j.mseb.2008.09.007

DOI: 10.1016/j.mseb.2008.09.007

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