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Differential Hall characterisation of ultrashallow doping in advanced Si-based materials

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

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Author(s): Bennett NS, Cowern NEB, Smith AJ, Kah M, Gwilliam RM, Sealy BJ, Noakes TCQ, Bailey P, Giubertoni D, Bersani M

Publication type: Article

Publication status: Published

Journal: Materials Science and Engineering B: Advanced Functional Solid-state Materials

Year: 2008

Volume: 154-155

Issue: 1-3

Pages: 229-233

Print publication date: 05/12/2008

ISSN (print): 1873-4944

Publisher: Elsevier SA

URL: http://dx.doi.org/10.1016/j.mseb.2008.10.003

DOI: 10.1016/j.mseb.2008.10.003

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