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Enhanced n-type dopant solubility in tensile-strained Si

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

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Publication metadata

Author(s): Bennett NS, Radamson HH, Beer CS, Smith AJ, Gwilliam RM, Cowern NEB, Sealy BJ

Publication type: Article

Publication status: Published

Journal: Thin Solid Films

Year: 2008

Volume: 517

Issue: 1

Pages: 331

Print publication date: 01/01/2008

ISSN (print): 0040-6090

Publisher: Elsevier SA

URL: http://dx.doi.org/10.1016/j.tsf.2008.08.072

DOI: 10.1016/j.tsf.2008.08.072

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