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Impact of multiple sub-melt laser scans on the activation and diffusion of shallow boron junctions

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern


Publication metadata

Author(s): Rosseel E, Vandervorst W, Clarysse T, Goossens J, Moussa A, Lin R, Petersen DH, Nielsen PF, Hansen O, Bennett NS, Cowern NEB

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors (RTP 2008)

Year of Conference: 2008

Pages: 135-140

Date deposited: 28/05/2010

ISSN: 9781424419500

Publisher: IEEE


DOI: 10.1109/RTP.2008.4690547