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Differential Hall profiling of ultra-shallow junctions in Si and SOI

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

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Author(s): Bennett N, Smith AJ, Colombeau B, Gwilliam R, Cowern NEB, Sealy BJ

Publication type: Article

Publication status: Published

Journal: Materials Science and Engineering B

Year: 2005

Volume: 124-125

Pages: 305-309

ISSN (print): 1873-4944

Publisher: Elsevier SA

URL: http://dx.doi.org/10.1016/j.mseb.2005.08.020

DOI: 10.1016/j.mseb.2005.08.020

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