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Antimony for NMOS ultrashallow junctions in strained Si: a superior dopant to arsenic

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

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Publication metadata

Author(s): Bennett NS, Smith AJ, Gwilliam RM, Webb RP, Sealy BJ, Cowern NEB, O'Reilly L, McNally PJ

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Unknown

Conference Name: INSIGHT

Year of Conference: 2007

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