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Enhanced n-type dopant solubility in tensile strained Si

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

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Author(s): Bennett NS, Radamson HH, Beer CS, Smith AJ, Gwilliam RM, Cowern NEB, Sealy BJ

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Unknown

Conference Name: 5th International Conference on Silicon Epitaxy and Heterostructures

Year of Conference: 2007

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