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Lookup NU author(s): Dr Konstantin VasilevskiyORCiD,
Dr Alton Horsfall,
Professor Nick Wright,
Dr Christopher Johnson
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Structural properties of Ni/Ti films deposited on 4H-SiC and annealed at temperatures from 800 to 1040°C have been studied. Films with three different metal deposition sequences were investigated by X-ray diffraction and Auger electron spectroscopy: (A) Ti(100 nm)/Ni(50 nm); (B) Ti(4 nm)/Ni(50 nm)/Ti(100 nm); and (C) Ti(4 nm)/Ni(150 nm). A distinct spatial separation of nickel silicide and titanium carbide layers was observed in all samples. It was discovered that the distribution of the products of the solid state chemical reaction in samples (A) and (B) was independent on the deposition sequence of Ti and Ni layers. The titanium carbide layer located on the interface and covered by the clearly separated nickel silicide layer was detected in both samples after heat treatments.
Author(s): Vassilevski KV, Nikitina IP, Horsfall AB, Wright NG, Johnson CM, Malhan RK, Yamamoto T
Editor(s): Devaty, RP; Larkin, DJ; Saddow, SE
Publication type: Conference Proceedings (inc. Abstract)
Publication status: Published
Conference Name: Materials Science Forum
Year of Conference: 2006
ISSN: 0255-5476 (print) 1422-6375 (online)
Publisher: Trans Tech Publications Ltd.
Notes: Silicon Carbide and Related Materials 2005
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