ePrints

Photoacoustic spectroscopy at the nanoscale for ultra-shallow implanted silicon

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

Downloads

Full text for this publication is not currently held within this repository. Alternative links are provided below where available.

Publication metadata

Author(s): Horan K, Stopford J, McNally P, Bennett N, Cowern NEB

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Unpublished

Conference Name: International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling

Year of Conference: 2009

Publisher: -

Sponsor(s): Imago Scientific Instruments, Capres A/S

Share