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Raman metrology for advanced CMOS devices - advantages and challenges

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

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Author(s): O'Reilly L, Horan K, McNally P, Timans P, Reyes J, Prussin S, Bennett N, Cowern N, Gelpey J, McCoy S, Lerch W, Paul S, Bolze D

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Unknown

Conference Name: Proceedings of INSIGHT

Year of Conference: 2009

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