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Gate-oxide interface roughness analyses for oxidation on strained and unstrained vicinal Si surfaces by transmission electron microscopy

Lookup NU author(s): Dr Sarah Olsen, Professor Anthony O'Neill


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Publication metadata

Author(s): Olsen S; O'Neill AG; Norris DJ; Cullis AG; Waite A; Evans A; Zhang J

Editor(s): Midgley, P.A., Cullis, A.G.

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Microscopy of Semiconducting Materials Conference

Year of Conference: 2003

Pages: 389-392

Publisher: Taylor & Francis

Library holdings: Search Newcastle University Library for this item

Series Title: Institute of Physics Conference Series

ISBN: 9780750309790