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Review of electrical characterisation of ultra-shallow junctions with micro four-point probe

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

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Author(s): Petersen D, Hansen O, Hansen T, Boggild P, Lin R, Kjaer D, Nielsen P, Clarysse T, Vandervorst W, Rosseel E, Bennett N, Cowern N

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Unknown

Conference Name: Proceedings of INSIGHT

Year of Conference: 2009

Pages: 68

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