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Ultra-shallow junctions in silicon via low thermal budget processing

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

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Publication metadata

Author(s): Sealy BJ, Smith AJ, Alzanki T, Bennett N, Li L, Jeynes C, Colombeau B, Collart EJH, Emerson NG, Gwilliam RM, Cowern NEB

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: International Workshop on Junction Technology

Year of Conference: 2006

Pages: 10-15

Publisher: IEEE

URL: http://dx.doi.org/10.1109/IWJT.2006.220850

DOI: 10.1109/IWJT.2006.220850

Library holdings: Search Newcastle University Library for this item

ISBN: 1424400473


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