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Measurement of Relaxation in Strained Silicon by Grazing Incidence In-plane X-ray Diffraction

Lookup NU author(s): Dr Sarah Olsen, Professor Anthony O'Neill

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Publication metadata

Author(s): Lafford TA, Olsen SH, Tanner BK, O'Neill AG

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name:

Year of Conference: 2004


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