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Doping of Sub-50nm SOI Layers

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern


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Publication metadata

Author(s): Pawlak BJ, Duffy R, van Dal M, Voogt F, Weemaes R, Roozeboom F, Zalm P, Bennett NEB, Cowern N

Editor(s): BJ Pawlak; M Law; K Suguro; ML Pelaz

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Materials Research Society Symposia Proceedings

Year of Conference: 2008

Pages: 1070-E04-06

ISSN: 0927-5002

Publisher: Elsevier BV