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Enhanced Antimony Activation for Ultra-Shallow Junctions in Strained Silicon

Lookup NU author(s): Dr Nick Bennett, Dr Gabriela Dilliway, Professor Nick Cowern

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Author(s): Bennett NS, Smith AJ, Beer CS, O'Reilly L, Colombeau B, Dilliway GD, Harper R, McNally PJ, Gwilliam R, Cowern NEB, Sealy BJ

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Symposium C, Materials Research Society Spring Meeting

Year of Conference: 2006

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