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Low Temperature B Activation in SOI Using Optimised Vacancy Engineering Implants

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

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Publication metadata

Author(s): Smith AJ, Colombeau B, Bennett N, Gwilliam R, Cowern NEB, Sealy BJ

Publication type: Article

Publication status: Published

Journal: Materials Research Society Symposium Proceedings

Year: 2005

Volume: 864

Issue: E7.1

Pages: 1-5

ISSN (print): 0272-9172

ISSN (electronic): 1946-4274

Publisher: Materials Research Society

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