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Diffusion of ion-implanted boron and silicon in germanium

Lookup NU author(s): Dr Suresh Uppal, Professor Nick Cowern


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Publication metadata

Author(s): Uppal S, Willoughby AFW, Bonar JM, Cowern NEB, Morris RJH, Dowsett MG

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Materials Science Forum: Materials Research Society Spring Meeting

Year of Conference: 2004

Pages: 237-242

ISSN: 0255-5476 (print) 1422-6375 (online)

Publisher: Trans Tech Publications Ltd.