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Strain-Enhanced Activation of Sb Ultrashallow Junctions

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern


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Publication metadata

Author(s): Bennett NS, O'Reilly L, Smith AJ, Gwilliam RM, McNally PJ, Cowern NEB, Sealy BJ

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Ion Implantation Technology Conference

Year of Conference: 2006