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Investigation of edge-chipping reduction on silicon micro-milling

Lookup NU author(s): Zi Choong, Dr Dehong Huo, Dr Patrick Degenaar, Professor Anthony O'Neill


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Publication metadata

Author(s): Choong ZJ, Huo D, Degenaar P, O'neill A

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: 16th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2016)

Year of Conference: 2016

Online publication date: 03/06/2016

Acceptance date: 02/04/2016

Publisher: EUSPEN


Library holdings: Search Newcastle University Library for this item

ISBN: 9780956679086


Link to this publication