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Determination of mechanical parameters for rotating MEMS structures as a function of deposition method

Lookup NU author(s): Sorin Soare, Professor Steve BullORCiD, Dr Adrian OilaORCiD, Professor Anthony O'Neill, Professor Nick Wright, Dr Alton Horsfall, Roberto dos Santos Araujo

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Author(s): Soare S, Bull SJ, Oila A, O'Neill A, Wright N, Horsfall A, dos Santos J

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: MRS Fall Meeting 2003

Year of Conference: 2004

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