Kai Wang Dr Alton Horsfall Professor Nick Wright Professor Anthony O'Neill Sorin Soare et al. | Calibration of MEMS-based test structures for predicting thermomechanical stress in integrated circuit interconnect structures | 2005 |
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Sorin Soare Professor Steve Bull Dr Adrian Oila Professor Anthony O'Neill Professor Nick Wright et al. | Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation | 2005 |
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Sorin Soare Professor Steve Bull Dr Adrian Oila Professor Anthony O'Neill Professor Nick Wright et al. | Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation | 2005 |
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Dr Alton Horsfall Professor Nick Wright Sorin Soare Professor Steve Bull Professor Anthony O'Neill et al. | Sensitivity of a rotating beam sensor for stress evaluation in aluminium thin films | 2005 |
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Dr Alton Horsfall Sorin Soare Professor Nick Wright Professor Anthony O'Neill Professor Steve Bull et al. | Test chip for the development and evaluation of sensors for measuring stress in metal interconnects | 2005 |
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Dr Alton Horsfall Professor Nick Wright Professor Anthony O'Neill Sorin Soare Professor Steve Bull et al. | Calibration and optimization of interconnect based MEMS test structures for predicting thermo-mechanical stress in metallization | 2004 |
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Dr Alton Horsfall Sorin Soare Professor Steve Bull Professor Nick Wright Professor Anthony O'Neill et al. | Dependence of process parameters on stress generation in aluminum thin films | 2004 |
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Sorin Soare Professor Steve Bull Dr Adrian Oila Professor Anthony O'Neill Professor Nick Wright et al. | Determination of mechanical parameters for rotating MEMS structures as a function of deposition method | 2004 |
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Sorin Soare Professor Steve Bull Dr Adrian Oila Professor Anthony O'Neill Professor Nick Wright et al. | Determination of mechanical parameters for rotating MEMS structures as a function of deposition method | 2004 |
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Sorin Soare Professor Steve Bull Dr Alton Horsfall Professor Nick Wright
| Hinge sensitivity in a micro-rotating structure for predicting induced thermo mechanical stress in integrated circuit metal interconnects | 2004 |
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Sorin Soare Professor Steve Bull Professor Anthony O'Neill Professor Nick Wright Dr Alton Horsfall et al. | Nanoindentation assessment of aluminium metallisation; the effect of creep and pile-up | 2004 |
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Dr Alton Horsfall Sorin Soare Professor Nick Wright Professor Anthony O'Neill Professor Steve Bull et al. | Test chip for the development and evaluation of test structures for measuring stress in metal interconnect | 2004 |
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Dr Alton Horsfall Sorin Soare Professor Nick Wright Professor Anthony O'Neill Professor Steve Bull et al. | A novel sensor for the direct measurement of process induced residual stress in interconnects | 2003 |
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Sorin Soare Professor Steve Bull Dr Alton Horsfall Joana Santos Professor Anthony O'Neill et al. | Assessment of aluminium thin films by nanindentation | 2003 |
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Sorin Soare Professor Steve Bull Dr Adrian Oila Professor Anthony O'Neill Nicola Wright et al. | Determination of mechanical parameters for rotatin MEMS as function of deposition method | 2003 |
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Sorin Soare Professor Steve Bull Dr Adrian Oila Professor Anthony O'Neill Professor Nick Wright et al. | Determination of mechanical parameters for rotating MEMS as a function of deposition method | 2003 |
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Sorin Soare Professor Steve Bull Dr Adrian Oila Professor Anthony O'Neill Professor Nick Wright et al. | Determination of mechanical parameters for rotating MEMS structures as a function of deposition method | 2003 |
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Dr Alton Horsfall Sorin Soare Professor Nick Wright Professor Anthony O'Neill Professor Steve Bull et al. | Direct measurement of residual stress in sub-micron interconnects | 2003 |
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Sorin Soare Dr Alton Horsfall Professor Steve Bull Professor Nick Wright Dr Adrian Oila et al. | Hinge optimisation in a micro-rotating structure for stress gauging in integrated circuit interconnects | 2003 |
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Sorin Soare Professor Steve Bull Dr Alton Horsfall Professor Nick Wright Professor Anthony O'Neill et al. | Hinge sensitivity in a micro-rotating structure for predicting induced thermo mechanical stress in integrated circuit metal interconnects | 2003 |
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Dr Alton Horsfall Sorin Soare Dr Adrian Oila Professor Steve Bull Professor Nick Wright et al. | Residual Stress Sensor for the Microelectronics Industry | 2003 |
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Sorin Soare Professor Steve Bull Professor Anthony O'Neill Professor Nick Wright
| Assessment of aluminium metallisation by nanoindentation | 2002 |
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