Determination of mechanical parameters for rotatin MEMS as function of deposition method

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Author(s): Soare S, Bull SJ, Oila A, O'Neill A, Wright N, Horsfall A, dos Santos J

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Proceedings of the Materials Research Society

Year of Conference: 2003

Pages: Paper No. U9.2

ISSN: 0272-9172

Publisher: Materials Research Society

Library holdings: Search Newcastle University Library for this item

ISBN: 19464274

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