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Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation

Lookup NU author(s): Sorin Soare, Professor Steve BullORCiD, Dr Adrian Oila, Professor Anthony O'Neill, Professor Nick Wright, Dr Alton Horsfall

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Abstract

© 2005 Carl Hanser Verlag, München. Sputtered aluminium layers from 250 to 2000 nm thick on (100) silicon have been indented to various depths and the nanoindentation load-displacement curves recorded. The loading curves were then simulated by finite element analysis and the results compared to identify the yield properties of the coating. Modelling data for thicker samples closely follows experimental data, but for thinner coatings there is a considerable gradient in properties through the film thickness.


Publication metadata

Author(s): Soare S, Bull SJ, Oila A, O'neill AG, Wright NG, Horsfall A, Dos Santos JMM

Publication type: Article

Publication status: Published

Journal: International Journal of Materials Research

Year: 2022

Volume: 96

Issue: 11

Pages: 1262-1266

Print publication date: 01/11/2005

Online publication date: 04/02/2022

Acceptance date: 29/04/2005

ISSN (print): 1862-5282

ISSN (electronic): 2195-8556

Publisher: Walter de Gruyter GmbH

URL: https://doi.org/10.1515/ijmr-2005-0220

DOI: 10.1515/ijmr-2005-0220


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