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Determination of mechanical parameters for rotating MEMS as a function of deposition method

Lookup NU author(s): Sorin Soare, Professor Steve BullORCiD, Dr Adrian OilaORCiD, Professor Anthony O'Neill, Professor Nick Wright, Dr Alton Horsfall

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Publication metadata

Author(s): Soare S; Wright N; Bull SJ; O'Neill A; Horsfal A; Oila A; dos Santos J

Editor(s): Corcoran S.G., Joo Y.-C., Moody N.R., Suo Z.

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Thin Films: Stresses and Mechanical Properties X

Year of Conference: 2003

Pages: 363-368

Publisher: Materials Research Society Symposium

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