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Physical characterization of residual implant damage in 4H-SiC double implanted bipolar technology

Lookup NU author(s): Dr Christopher Johnson, Professor Anthony O'Neill, Dr Alton Horsfall, Dr Sylvie Ortolland, Kazuhiro Adachi, Dr Gordon Phelps


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Publication metadata

Author(s): Coleman AP, Wright NG, Johnson CM, O'Neill AG, Horsfall A, Ortolland S, Adachi K, Phelps GJ, Knights PG, Burrows CP

Editor(s): Agarwal A

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Silicon Carbide - Materials, Processing and Devices: Symposium

Year of Conference: 2000

Pages: H5.30.1-5

ISSN: 9781558995505

Publisher: Materials Research Society

Notes: Published Abstract: 2001 in book form.

Series Title: Materials Research Society Symposium Proceedings