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The Newcastle University research output collection, currently available on ePrints, will shortly be moving to a new open repository platform, Figshare. To prepare for the data migration we have paused adding new content to ePrints, and will resume once the new repository is launched. During this time you will continue to have access to ePrints (but no new content will appear). We will share updates here when available.

Effect of metal-oxide-semiconductor processing on the surface rouhness of strained Si/SiGe material

Lookup NU author(s): Dr Sarah OlsenORCiD, Professor Anthony O'Neill, Professor Steve BullORCiD

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This is the final published version of an article that has been published in its final definitive form by American Institute of Physics, 2002.

For re-use rights please refer to the publisher's terms and conditions.


Publication metadata

Author(s): Olsen SH, O'Neill AG, Bull SJ, Woods NJ, Zhang J

Publication type: Article

Publication status: Published

Journal: Journal of Applied Physics

Year: 2002

Volume: 92

Issue: 3

Pages: 1298-

Date deposited: 15/09/2016

ISSN (print): 0021-8979

ISSN (electronic): 1520-8850

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.1489712

DOI: 10.1063/1.1489712


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