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Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation

Lookup NU author(s): Sorin Soare, Professor Steve BullORCiD, Dr Adrian OilaORCiD, Professor Anthony O'Neill, Professor Nick Wright, Dr Alton Horsfall

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Abstract

Sputtered aluminium layers from 250 to 2000 nm thick on (100) silicon have been indented to various depths and the nanoindentation load-displacement curves recorded. The loading curves were then simulated by finite element analysis and the results compared to identify the yield properties of the coating. Modelling data for thicker samples closely follows experimental data, but for thinner coatings there is a considerable gradient in properties through the film thickness. © Carl Hanser Verlag.

Publication metadata

Author(s): Soare S, Bull SJ, Oila A, O'Neill AG, Wright NG, Horsfall A, Dos Santos JMM

Publication type: Article

Publication status: Published

Journal: Zeitschrift für Metallkunde

Year: 2005

Volume: 96

Issue: 11

Pages: 1262-1266

Print publication date: 01/11/2005

ISSN (print): 0044-3093

ISSN (electronic):

Publisher: Carl Hanser Verlag

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